| 21 | 0 | 6 |
| 下载次数 | 被引频次 | 阅读次数 |
[目的]对紫铜进行等离子电解抛光处理,以解决传统抛光工艺存在的效率低、环境污染等问题,实现高效、绿色的表面精加工。[方法]通过正交试验研究加工电压、抛光时间、电解液温度及试样下潜深度对紫铜抛光后表面粗糙度的影响,对比了抛光前后紫铜的外观、表面形貌、显微硬度和耐蚀性。[结果]紫铜等离子电解抛光的较优工艺参数为:电压260 V,电解液温度60℃,抛光时间11 min,下潜深度8 cm。在该条件下抛光后,紫铜的表面光洁度与均匀性明显改善,显微硬度略降,表面粗糙度Ra可由0.834μm降至0.052μm,疏水性增强,耐蚀性显著提升。[结论]等离子电解质抛光可高效、环保地实现紫铜表面精整,在航空航天、集成电路等领域具有广阔的应用前景。
Abstract:[Objective] Plasma electrolytic polishing was applied to red copper to address the issues of low efficiency and environmental pollution associated with conventional polishing processes, thereby achieving an efficient and green surface finishing. [Method] The effects of processing voltage, polishing time, electrolyte temperature, and immersion depth on the surface roughness of red copper after polishing were studied through orthogonal experiments. The appearance, surface morphology, microhardness, and corrosion resistance of red copper before and after plasma electrolytic polishing were compared. [Result] The optimized process parameters for plasma electrolytic polishing of red copper were determined as follows: voltage 260 V, electrolyte temperature 60 °C, polishing time 11 min, and immersion depth 8 cm. Under these conditions, the surface finish and uniformity of red copper were significantly improved, while the microhardness was slightly decreased. The surface roughness Ra was reduced from 0.834 μm to 0.052 μm, accompanied by enhanced hydrophobicity and significantly improved corrosion resistance. [Conclusion] Plasma electrolytic polishing can achieve efficient and environmentally friendly surface finishing of red copper, demonstrating broad application prospects in fields such as aerospace and integrated circuits.
[1]徐浩.铜化学机械抛光液组分优化及其作用机理研究[D].无锡;江南大学, 2023.XU H. Study on component optimization and mechanism of chemical mechanical polishing liquid for copper[D]. Wuxi:Jiangnan University,2023.
[2]于志坚.铜的化学机械抛光液研究[D].大连:大连理工大学, 2018.YU Z J. Investigation of chemical mechanical polishing slurry for copper[D]. Dalian:Dalian University of Technology, 2018.
[3]周密愉.铜和碳化硅电化学机械抛光工艺方法研究[D].哈尔滨:哈尔滨工业大学, 2019.ZHOU M Y. Study on electrochemical mechanical polishing process of copper and silicon carbide[D]. Harbin:Harbin Institute of Technology,2019.
[4]CHEMKHI M, RETRAINT D, ROOS A, et al. Role and effect of mechanical polishing on the enhancement of the duplex mechanical attrition/plasma nitriding treatment of AISI 316L steel[J]. 2017, 325:454-461.
[5]AWAD A M, GHAZY E A, ABO EL-ENIN S A, et al. Electropolishing of AISI-304 stainless steel for protection against SRB biofilm[J].Surface&Coatings Technology, 2012, 206, 3165-3172.
[6]ZIEMNIAK S E, HANSON M, SANDER P C. Electropolishing effects on corrosion behavior of 304 stainless steel in high temperature,hydrogenated water[J]. Corrosion Science, 2008, 50(9):2465-2477.
[7]ALIAKSEYEU Y, KOROLYOV A, NISS V S, et al. Electrolyte plasma polishing of titanium and niobium alloys[J]. Science&Technique, 2018, 17(3):211-219.
[8]PARFENOV E V, YEROKHIN A, NEVYANTSEVA R R, et al.Towards smart electrolytic plasma technologies:an overview of method ological approaches to process modelling[J]. Surface and Coatings Technology, 2015, 269:2-22.
[9]JI G Q, SUN H W, DUAN H D, et al. Effect of electrolytic plasma polishing on microstructural evolution and tensile properties of 316L stainless steel[J]. Surface and Coatings Technology, 2021, 420:127330.
[10]GALEDARI S A, KHOEI S M M. Effect of pulse frequency on microstructure and surface properties of Ck45 steel treated by plasma electrolysis method[J]. Journal of Alloys and Compounds, 2013, 551:415-421.
[11]张超人.铝与钛合金及紫铜表面等离子体电解抛光机理与工艺优化[D].哈尔滨:哈尔滨工业大学, 2021.ZHANG C R. Plasma electrolytic polishing mechanism and process optimization of aluminum and titanium alloy and copper surface[D].Harbin:Harbin Institute of Technology, 2021.
[12]AHN B H, SONG J I, KOO B H. Effect of electrolyte on mechanical properties of AZ31B Mg alloy in electrolytic plasma processing[J].Transactions of Nonferrous Metals Society of China, 2014, 24(Suppl.1):s125-s128.
[13]张凯伟. TC4合金表面微弧等离子体抛光与涂层去除研究[D].哈尔滨:哈尔滨工业大学, 2022.ZHANG K W. Study on micro arc plasma polishing and coating removal of TC4 alloy[D]. Harbin:Harbin Institute of Technology,2022.
[14]何小琳.锆基非晶合金电解质等离子体抛光机理研究[D].广州:广东工业大学, 2019.He X L. Study on plasma electrolyte polishing mechanism of zirconium-based amorphous alloys[D]. Guangzhou:Guangdong University of Technology, 2019.
[15]邹永纯,王树棋,陈国梁,等. 304钢等离子体电解抛光工艺与其表面结构性能研究[J].表面技术, 2023, 52(6):51-60.ZOU Y C, WANG S Q, CHEN G L, et al. Process, surface structure and properties of 304 steel by plasma electrolytic polishing[J]. Surface Technology, 2023, 52(6):51-60.
[16]NESTLER K, BÖTTGER-HILLER F, ADAMITZKI W, et al. Plasma electrolytic polishing—an overview of applied technologies and current challenges to extend the polishable material range[J]. Procedia CIRP, 2016, 42:503-507.
[17]黄志鹏.铜合金的电解质-等离子抛光方法的研究[D].哈尔滨:哈尔滨工业大学, 2014.HUANG Z P. Copper alloy electrolyte–plasma polishing method[D].Harbin:Harbin Institute of Technology, 2014.
[18]REINHARDT F, BÖTTGER-HILLER F, KRANHOLD C, et al.Surface modification for corrosion resistance of electric conductive metal surfaces with plasma electrolytic polishing[J]. AIP Conference Proceedings, 2019, 2113:110009.
[19]崔祎赟,熊夏青,徐凯,等.等离子抛光时间对3D打印多孔钛表面粗糙度的影响[J].稀有金属材料与工程, 2022, 51(6):2161-2166.CUI Y Y, XIONG X Q, XU K, et al. Influence of electrolytic plasma polishing time on surface roughness of porous titanium by 3D printing[J]. Rare Metal Materials and Engineering, 2022,51(6):2161-2166.
基本信息:
DOI:10.19289/j.1004-227x.2026.02.014
中图分类号:TG175
引用信息:
[1]葛玉麟,邹永纯,程佳浩,等.紫铜等离子电解抛光工艺研究[J].电镀与涂饰,2026,45(02):120-125.DOI:10.19289/j.1004-227x.2026.02.014.
基金信息:
国家自然科学基金(52571078,52001100); 北京市自然科学基金(2244110)