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[目的]微盲孔与通孔电镀填充是实现高密度互连与三维集成的关键工艺，其过程涉及多物理场强耦合作用，传统实验方法难以全面揭示其内在机制。COMSOL Multiphysics作为多物理场仿真工具，在该过程的机理研究、工艺优化与缺陷预测中具有重要价值。[方法]综述了COMSOL在该领域的应用进展，阐述了基于拉普拉斯方程、Nernst-Planck方程、Navier-Stokes方程、Butler-Volmer方程及添加剂吸附动力学模型的多物理场耦合建模方法。[结果] COMSOL模拟能够直观呈现电场、离子浓度、流场和添加剂分布情况及其变化，定量预测局部沉积速率与形貌变化，从而揭示自下而上填充机制、评估空洞形成风险，并为工艺参数优化提供可视化依据。[结论]数值模拟已成为研究添加剂作用下电镀填充过程的重要工具，COMSOL通过多物理场耦合实现了对微盲孔与通孔电镀行为的准确描述与预测，对机理研究与工艺优化具有重要意义。
Abstract：[Objective] The electroplating filling of micro-vias and through-holes is a key process for achieving highdensity interconnects and 3D integration. This process involves strong multiphysics coupling, making it difficult for traditional experimental methods to fully reveal its underlying mechanisms. As a powerful multiphysics simulation tool, COMSOL Multiphysics has significant value in the mechanistic study, process optimization, and defect prediction of this process. [Method] A review of COMSOL's application progress in this field was presented, along with an elaboration of the multiphysics coupled modeling methods based on the Laplace, Nernst-Planck, Navier-Stokes, and Butler-Volmer equations, as well as additive adsorption kinetic models. [Result] COMSOL simulations can intuitively present the distribution and evolution of electric fields, ion concentrations, flow fields, and additives, quantitatively predict local deposition rates and morphological changes, thereby revealing the bottom-up filling mechanism, assessing the risk of void formation, and providing visual guidance for process parameter optimization. [Conclusion] Numerical simulation has become an essential tool for studying the electroplating filling process under the influence of additives. By implementing multiphysics coupling, COMSOL enables accurate description and prediction of electroplating behavior in micro-vias and through-holes, which is of great significance for mechanistic research and process optimization.
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基本信息:
DOI：10.19289/j.1004-227x.2025.12.006
中图分类号:TQ153
引用信息:
[1]祝辣,贾晨鑫,汪丽敏,等.COMSOL在微盲孔与通孔电镀填充模拟中的应用[J].电镀与涂饰,2025,44(12):36-43.DOI:10.19289/j.1004-227x.2025.12.006.
基金信息:
兰州市科技局项目（2025-2-50）; 兰州交通大学《金属腐蚀与防护》课程思政示范课程项目
2025-12-20
2025-12-20